The solution — liquid tin targets — is not directly transferable to rare-earth materials because of their high melting points. In parallel with the development of EUV lithography at 13.5 nm ...

A Chinese company has achieved a game-changing breakthrough in photoresist, a key material for semiconductor lithography machines, successfully passing mass production tests, according to officials ...

Recent advancements in light-based lithography, including EUVL, have significantly improved semiconductor manufacturing.

Corning introduces new Extreme ULE glass for photomasks and mirrors to be used with next-generation EUV and High-NA EUV tools ...

Russia's proposed spending on its own chipmaking tools industry by 2030 is 57 times lower than its spending on war against ...

Combining Thermal Scanning Probe Lithography (t-SPL), Direct Laser Sublimation (DLS), and enhanced automation, the NanoFrazor ...

The number of entries in Throne and Liberty's Lithography Book can be overwhelming at first, but understanding it leads to ...

DUV lithography machines are used to manufacture ... especially in cutting-edge semiconductor making equipment and fundamental chip materials, Sheng said, adding that "some advanced chip packaging ...