China's latest technological breakthroughs in homegrown deep ultraviolet (DUV) lithography machines mark a significant milestone in the country's semiconductor manufacturing equipment sector, and will ...
In contrast to conventional photolithography equipment, which transfers a circuit pattern by projecting ... including advanced packaging technology. Canon will continue to promote research and ...
Summary China's Ministry of Industry and Information Technology added two domestically-made lithography systems, a krypton fluoride (KrF) and argon fluoride (ArF) scanner, to its equipment adoption ...